4 April 2005 Emitting 1530-nm light from mixture of Er2O3, P2O5 nanoparticles and spin-on-glass on silicon
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Abstract
We introduce a new fabricating technique that forms a light emitting layer on silicon wafer. This emitting layer could emit light at 1530nm. We mix the Er2O3 nanoparticles with spin-on glass, then deposit this mixed solution onto silicon wafer. It emits 1530nm light because Er2O3 nanoparticles release Er3+ into glass at high temperature. The manufacturing process is very simple and low cost. We also add P2O5, Si, Al, and Ag nanoparticles in order to modify the physical characteristics and light emission efficiency.
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Kuo-Jui Sun, Yi-Shin Su, Ching-Fuh Lin, "Emitting 1530-nm light from mixture of Er2O3, P2O5 nanoparticles and spin-on-glass on silicon", Proc. SPIE 5723, Optical Components and Materials II, (4 April 2005); doi: 10.1117/12.589780; https://doi.org/10.1117/12.589780
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