Micro-mirror formed using excimer laser processing in a polymer waveguide

Tsuyoshi Shioda

doi:10.1117/12.592060

4 April 2005 Micro-mirror formed using excimer laser processing in a polymer waveguide

Tsuyoshi Shioda

Proceedings Volume 5724, Organic Photonic Materials and Devices VII; (2005) https://doi.org/10.1117/12.592060
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

A micro-mirror formed using excimer laser processing for a fluorinated polyimide waveguide film was demonstrated. The tilted excimer laser irradiation to the waveguide core formed a micro-mirror with an angle of 45 +/- 1-degree. The micro-mirror had convex profile and exhibited a lens effect as a concave mirror. The micro-mirror, as formed, exhibited a low reflection loss of approximately 0.6dB at a wavelength of 850nm. This technique applied to flexible optical and electrical circuit board.

Citation Download Citation

Tsuyoshi Shioda "Micro-mirror formed using excimer laser processing in a polymer waveguide", Proc. SPIE 5724, Organic Photonic Materials and Devices VII, (4 April 2005); https://doi.org/10.1117/12.592060

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