4 April 2005 Systematic study of polymer wideband optical modulators: transition from intrinsic material characteristics to device performance
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Abstract
Low drive voltage Mach-Zehnder modulators were designed and fabricated using proprietary EO polymers with high electro-optic coefficients. We report on drive voltage and high-speed electrode parameters of modulators fabricated on silicon wafers with high yield. Special attention was paid to designing claddings to match the electro-optic core conductivity and dielectric constant. The r33 values measured on single layer thin films are compared with those resulting from drive voltage measurements on devices. Half-wave voltage measured on devices is compared with theoretical values derived from equations defined for poling of the core through bottom and top claddings. We compare results obtained from devices fabricated using commercially available UV-curable epoxies with devices fabricating using proprietary clad polymers developed at Lumera Corporation.
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Raluca Dinu, Timothy C. Parker, Diyun Huang, Dan L. Jin, Mary Koenig, "Systematic study of polymer wideband optical modulators: transition from intrinsic material characteristics to device performance", Proc. SPIE 5724, Organic Photonic Materials and Devices VII, (4 April 2005); doi: 10.1117/12.605266; https://doi.org/10.1117/12.605266
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