31 March 2005 Planar glass integrated optical structure based on prism decoupling for sensing applications
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Abstract
We present the design of an innovating integrated planar structure adapted for intensity or phase measurements. It is based on the evanescent prism decoupling of the optical signal from a waveguide used as the sensing element. The device is formed by successive thin film sputtering deposition. A TiO2 crystalline layer forms the gas sensing element from which light is coupled out by a planar high refractive index prism. We experimentally validate the structure.
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Celia A. Sanchez-Perez, Elise Ghibaudo, Jean-Emmanuel Broquin, Augusto Garcia-Valenzuela, A. Esparza-Garcia, M. A. Camacho-Lopez, "Planar glass integrated optical structure based on prism decoupling for sensing applications", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); doi: 10.1117/12.590590; https://doi.org/10.1117/12.590590
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