Simplification of the design and the fabrication of a glass integrated displacement sensor with acousto-optic modulation

Luis Poffo; Pierre Lemaitre-Auger; Philippe Benech; Pierre Benech

doi:10.1117/12.590560

31 March 2005 Simplification of the design and the fabrication of a glass integrated displacement sensor with acousto-optic modulation

Luis Poffo, Pierre Lemaitre-Auger, Philippe Benech, Pierre Benech

Author Affiliations +

Proceedings Volume 5728, Integrated Optics: Devices, Materials, and Technologies IX; (2005) https://doi.org/10.1117/12.590560
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

Optical interferometer displacement sensors are well known for their high resolution, up to 10^-7 m in a stabilised environment, over a wide measuring range which can reach several meters. Moreover, the measures are carried out without any mechanical contact with the target object. Two optical outputs are however needed to determine the displacement direction. A glass integrated sensor with only one optical output that still measures the displacement direction is proposed here. It is derived from a Michelson interferometer but is realised by ion-exchange on a glass substrate. A piezoelectric element placed over the reference arm produces a longitudinal acoustic wave that creates a small phase modulation on the reference light beam at a high frequency (1.28 MHz). A small modulation of the output signal is thus produced. The direction determination is based on the comparison between the phases of the excitation acoustic signal and of the high frequency part of the sensor's output signal after proper signal processing. A theoretical and an experimental demonstration of that principle are presented. A precision of 158 nm was obtained with a simple numerical signal processing.

Citation Download Citation

Luis Poffo, Pierre Lemaitre-Auger, Philippe Benech, and Pierre Benech "Simplification of the design and the fabrication of a glass integrated displacement sensor with acousto-optic modulation", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, (31 March 2005); https://doi.org/10.1117/12.590560

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