7 March 2005 Fully integrated optical systems for lab-on-a-chip applications
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The integration of optical transducers is generally considered a key issue in the further development of lab-on-a-chip microsystems. We present a technology for the integration of miniaturized, polymer based lasers, with planar waveguides, microfluidic networks and substrates such as structured silicon. The flexibility of the polymer patterning process, enables fabrication of laser light sources and other optical components such as waveguides, lenses and prisms, in the same lithographic process step on a polymer. The optically functionalised polymer layer can be overlaid on any reasonably flat substrate, such as electrically functionalised Silicon containing photodiodes. This optical and microfluidic overlay, interfaces optically with the substrate through the polymer-substrate contact plane. Two types of integrable laser source devices are demonstrated: microfluidic- and solid polymer dye lasers. Both are based on laser resonators defined solely in the polymer layer. The polymer laser sources are optically pumped with an external laser, and emits light in the chip plane, suitable for coupling into chip waveguides. Integration of the light sources with polymer waveguides, micro-fluidic networks and photodiodes embedded in a Silicon substrate is shown in a device designed for measuring the time resolved absorption of two fluids mixed on-chip. The feasibility of three types of polymers is demonstrated: SU-8, PMMA and a cyclo-olefin co-polymer (COC) -- Topas. SU-8 is a negative tone photoresist, allowing patterning with conventional UV lithography. PMMA and Topas are thermoplasts, which are patterned by nanoimprint lithography (NIL).
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Soren Balslev, Soren Balslev, Brian Bilenberg, Brian Bilenberg, Daniel Nilsson, Daniel Nilsson, Anders Michael Jorgensen, Anders Michael Jorgensen, Anders Kristensen, Anders Kristensen, Oliver Geschke, Oliver Geschke, Jorg P. Kutter, Jorg P. Kutter, Klaus B. Mogensen, Klaus B. Mogensen, Detlef Snakenborg, Detlef Snakenborg, } "Fully integrated optical systems for lab-on-a-chip applications", Proc. SPIE 5730, Optoelectronic Integration on Silicon II, (7 March 2005); doi: 10.1117/12.589099; https://doi.org/10.1117/12.589099

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