11 March 2005 Integration of microlens with planar lightwave circuit
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Abstract
A silica micro-lens pair has been proposed which can be integrated with planar optical waveguide circuits. The lens pair enables an optical signal to travel in free space between two opposing planar waveguides with minimal optical loss. Each lens in the lens pair consists of a slab GRIN lens with a convexly shaped front face. This paper briefly reviews the micro-lens design process and reports progress in fabricating the device. The characterisation of the GRIN layer and masking experiments used to evaluate the deep oxide etch are presented. A selectivity of 250:1 was achieved for the deep oxide etch using a NiCr mask.
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Mark R. Mackenzie, Chee Yee Kwok, Gang Ding Peng, "Integration of microlens with planar lightwave circuit", Proc. SPIE 5731, Photonics Packaging and Integration V, (11 March 2005); doi: 10.1117/12.591373; https://doi.org/10.1117/12.591373
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