25 March 2005 Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications
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Abstract
The design of a miniature capacitive microphone is discussed with specific application to photoacoustic instrumentation. It is demonstrated that a microphone design optimized for use in PAS can provide significant improvements in performance, with positive implications on the overall system performance. Furthermore, it is shown that MEMS-based microphone technology allows for important improvements in microphone vibration sensitivity, size, cost and ruggedness with direct application to portable PAS systems.
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Michael Pedersen, John McClelland, "Optimized capacitive MEMS microphone for photoacoustic spectroscopy (PAS) applications", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); doi: 10.1117/12.597136; https://doi.org/10.1117/12.597136
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