13 April 2005 Characterization of simple cubic 3D photonic crystals with complete photonic bandgaps
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The major challenge in todays photonic crystal fabrication is the experimental realization of perfect, disorder-free structures. Macroporous silicon etching is a versatile technique for the manufacturing of large-scale well-ordered porous materials and three-dimensional photonic crystals. We investigate the degree of local disorder by scanning electron microscopy and a subsequent image processing, as well as the homogeneity of our large area crystals by an optical two-dimensional mapping. The observed disorder is related to the applied fabrication parameters. The deduced dependencies help to avoid disorder and to optimize our structures.
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Sven Matthias, Frank Mueller, Ulrich M. Goesele, "Characterization of simple cubic 3D photonic crystals with complete photonic bandgaps", Proc. SPIE 5733, Photonic Crystal Materials and Devices III, (13 April 2005); doi: 10.1117/12.590591; https://doi.org/10.1117/12.590591

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