14 March 2005 Three-dimensional integration of VCSEL-based optoelectronics
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A monolithic optoelectronic device structure with the potential to enable VCSEL-based photonic integrated circuits on GaAs is presented. Using integrated diffraction gratings, the device structure enables the optical output of VCSELs to be coupled to an internal horizontal waveguide, while the optical signals in the waveguide are tapped off to resonant cavity detectors. Since horizontal waveguides are used to route the optical signals between devices, the output mirror transmission of the VCSELs can be eliminated, although we have chosen to retain a small amount of transmission in the top DBR to enable on-wafer testing. The design and fabrication of the monolithically integrated structure, including epitaxial regrowth, is discussed and initial device characteristics are presented.
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Duane A. Louderback, Duane A. Louderback, Hung-Cheng Lin, Hung-Cheng Lin, Melanie A. Fish, Melanie A. Fish, Julien Cheng, Julien Cheng, Peter S. Guilfoyle, Peter S. Guilfoyle, } "Three-dimensional integration of VCSEL-based optoelectronics", Proc. SPIE 5737, Vertical-Cavity Surface-Emitting Lasers IX, (14 March 2005); doi: 10.1117/12.601835; https://doi.org/10.1117/12.601835

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