Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective

U. Hinze; A. Egbert; B. Chichkov

doi:10.1117/12.598743

6 May 2005 Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective

U. Hinze, A. Egbert, B. Chichkov

Author Affiliations +

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.598743
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Two applications of an electron-based EUV-tube are presented: the set up of a grazing incidence EUV reflectometer with high reproducibility and accuracy, and our works towards the realization and application of a Schwarzschild objective for EUV imaging. Both applications benefit form the use of the table-top EUV-source, which is debris-free, long-term stable, and compact.

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U. Hinze, A. Egbert, and B. Chichkov "Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.598743

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