6 May 2005 Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective
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Abstract
Two applications of an electron-based EUV-tube are presented: the set up of a grazing incidence EUV reflectometer with high reproducibility and accuracy, and our works towards the realization and application of a Schwarzschild objective for EUV imaging. Both applications benefit form the use of the table-top EUV-source, which is debris-free, long-term stable, and compact.
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U. Hinze, U. Hinze, A. Egbert, A. Egbert, B. Chichkov, B. Chichkov, } "Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); doi: 10.1117/12.598743; https://doi.org/10.1117/12.598743
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