A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki; Mototaka Arakawa; Yuji Ohashi; Kouji Suzuki; Takahisa Maruyama

doi:10.1117/12.599160

10 May 2005 A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system

Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Kouji Suzuki, Takahisa Maruyama

Author Affiliations +

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.599160
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

A super-precision evaluation method of the coefficient of thermal expansion (CTE) of ultra-low expansion glasses was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for TiO2-SiO2 glass. The sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) in CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (σ: standard deviation) at 225 MHz. LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in the specimens were successfully detected and evaluated, providing two-dimensional information under the nondestructive and noncontact measurement condition. This ultrasonic method is much more accurate than conventional methods, for evaluating CTE on the surface of ultra-low-expansion glass materials needed for extreme ultra-violet lithography (EUVL) systems.

Citation Download Citation

Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Kouji Suzuki, and Takahisa Maruyama "A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.599160

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