Author Affiliations +
Yucong Zhu,1 Katsumi Sugisaki,1 Masashi Okada,1 Katsura Otaki,1 Zhiqian Liu,1 Mikihiko Ishii,1 Jun Kawakami,1 Jun Saito,1 Katsuhiko Murakami,1 Chidane Ouchi,1 Masanobu Hasegawa,1 Seima Kato,1 Takayuki Hasegawa,1 Akiyoshi Suzuki,1 Masahito Niibe2
1Extreme Ultraviolet Lithography System Development Association (Japan)
2Univ. of Hyogo (Japan)