10 May 2005 Nano-imaging with compact extreme ultraviolet laser sources
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Abstract
We report high resolution imaging results obtained utilizing small-scale extreme ultraviolet laser sources. A compact capillary-discharge pumped Ne-like Ar laser emitting at a wavelength of 46.9 nm was used to demonstrate imaging with nanometer-scale resolution in transmission and reflection modes. We exploited the large photon fluence of this short wavelength laser to obtain high-resolution images with exposure times as short as 1-10 seconds. Images with a spatial resolution better than 140 nm were obtained using the combination of a Sc/Si multilayer coated Schwarzschild condenser and free-standing objective zone plate. Preliminary results of imaging with a 13.9 nm extreme ultraviolet laser light are also discussed.
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G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, Y. Wang, M. A. Larotonda, B. M. Luther, C. S. Menoni, M. Marconi, J. J. Rocca, W. L. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, V. V. Kondratenko, "Nano-imaging with compact extreme ultraviolet laser sources", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); doi: 10.1117/12.601899; https://doi.org/10.1117/12.601899
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