A novel patterning method of low-resistivity metals

Chang-Ho Noh; Jin-Young Kim; Ho-Chul Lee; Ok-Chae Hwang; Sung-Heon Cho; Ki-Yong Song; Jong-Min Kim

doi:10.1117/12.597281

4 May 2005 A novel patterning method of low-resistivity metals

Chang-Ho Noh, Jin-Young Kim, Ho-Chul Lee, Ok-Chae Hwang, Sung-Heon Cho, Ki-Yong Song, Jong-Min Kim

Proceedings Volume 5753, Advances in Resist Technology and Processing XXII; (2005) https://doi.org/10.1117/12.597281
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

A new metal patterning process using photocatalyst was developed to reduce the number of chemical processing steps and to obtain high resolution. Films of amorphous TiO₂ and water-soluble polyvinyl alcohol were used as photocatalytic layers. UV light was illuminated through a photomask onto the photocatalytic layers. Pd(II) in an aqueous solution was reduced to Pd(0) by the exposed TiO₂ and deposited on the exposed regions. Selective electroless Ni/Cu plating on the Pd patterns showed high resolution metal patterns. Process parameters such as exposure dose and postexposure time delay were optimized to confirm the feasibility of this method. It was established that high resolution metal patterns of low resistivity with good adhesion were formed only at a small process steps without using high cost materials and equipments. Selective growth of carbon nanotubes on the Ni patterns was carried out by plasma-enhanced chemical vapor deposition. It’s expected that this methods will have several benefits for fabricating the microelectronic devices, especially in the large size flat panel display.

Citation Download Citation

Chang-Ho Noh, Jin-Young Kim, Ho-Chul Lee, Ok-Chae Hwang, Sung-Heon Cho, Ki-Yong Song, and Jong-Min Kim "A novel patterning method of low-resistivity metals", Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); https://doi.org/10.1117/12.597281

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