Considering the flare by introducing the random aberration and non-conserved aberration

Masato Shibuya; Nobuaki Watanabe; Hiromi Ezaki; Suezou Nakadate

doi:10.1117/12.600818

12 May 2005 Considering the flare by introducing the random aberration and non-conserved aberration

Masato Shibuya, Nobuaki Watanabe, Hiromi Ezaki, Suezou Nakadate

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.600818
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

We have already revealed that wavefront aberration can be categorized into figure and random aberrations and also concluded that the phenomenon of local flare can be explained by the concept of random aberration [1]. In this report, considering the finer undulation of wavefront aberration, we introduce the new concept of non-conserved wavefront aberration. Considering these classified aberrations, we discuss the flare.

Citation Download Citation

Masato Shibuya, Nobuaki Watanabe, Hiromi Ezaki, and Suezou Nakadate "Considering the flare by introducing the random aberration and non-conserved aberration", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.600818

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