Examination of the prevalence and abundance of noncondensable, nonreactive optical surface contaminants in the scanner environment

F. Belanger; P. Cate; A. Grayfer; R. Petersen; D. Ruede

doi:10.1117/12.610665

12 May 2005 Examination of the prevalence and abundance of noncondensable, nonreactive optical surface contaminants in the scanner environment

F. Belanger, P. Cate, A. Grayfer, R. Petersen, D. Ruede

Author Affiliations +

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.610665
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

With the advent of 193 nm scanners, concerns about species with the potential to deposit films on unprotected optical surfaces has uncovered a long list of reactive and condensable compounds that have occupied the efforts of exposure tool and filter system suppliers for the past several years. As more experience and data is gathered from 193 nm tools now running in volume production fabs, new classes of noncondensable, nonreactive species of concern have been discovered. Some of these compounds contain refractory elements such as Si and P and can potentially lead to permanent lens contamination. The authors describe work performed to better understand the prevalence and abundance of such refractory compounds, with special emphasis on advanced sampling and analysis methods needed to accurately characterize and quantify the species of interest. Data from used filter post-mortem analysis is compared with standard airborne sampling shows a much richer data set in which trace species can be examined. Progression of such species through a serial filter array provides new insight to filter kinetics and prediction of filter performance through life.

Citation Download Citation

F. Belanger, P. Cate, A. Grayfer, R. Petersen, and D. Ruede "Examination of the prevalence and abundance of noncondensable, nonreactive optical surface contaminants in the scanner environment", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.610665

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available