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12 May 2005 Improvement of the lifetime of the optical coatings under high power laser irradiations
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Abstract
To maintain high transmittance for long time use in the ArF and F2 lithography exposure tools is highly requested, which is strongly dependent on the transmittance of the optical coatings. The following experimental fact was reported in the F2 laser durability testing; the transmittance degradation of the optical coatings did not occur under low power laser irradiation of less than 5 mJ/cm2, but a catastrophic degradation of transmittance did under high power laser irradiation over 15 mJ/cm2. We have set a program to investigate the causes of the laser-induced degradation of the optical coatings. Consequently, we have found a relationship between the contaminations of the irradiation atmosphere and the transmittance degradation through various experimental conditions and analyses such as SIMS and GCMS. Finally, we have succeeded in remarkably improving the durability of the antireflection coating (ARC) by optimizing the atmospheric conditions.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ryuji Biro, Tetsuzo Ito, Seiji Kuwabara, Hirotaka Fukushima, Hideo Akiba, Keisui Banno, Yasuyuki Suzuki, Minoru Otani, and Kazuho Sone "Improvement of the lifetime of the optical coatings under high power laser irradiations", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.597156
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