What makes a coherence curve change?

Stephen P. Renwick

doi:10.1117/12.598939

12 May 2005 What makes a coherence curve change?

Stephen P. Renwick

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.598939
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

With use of OPC on the rise, lithographers have now added coherence behavior to their list of important concerns about an imaging tool. Previously, parameters like nested-to-isolated bias were important. Now, we need to think about the behavior of an entire coherence curve, which is a plot of printed linewidth versus pitch for a set of features at constant reticle linewidth. While the precise shape of a curve may not be especially important, the lithographer will want to know the tool-to-tool variation and whether the curve will change with time. That variation is affected by at least both lens aberrations and illuminator pupil fill, and potentially by other factors as well, like flare or optics contamination. We have made a systematic study of coherence sensitivity to a host of potential factors, and we will present a sensitivity analysis, identifying the big and the small drivers of coherence-curve behavior.

Citation Download Citation

Stephen P. Renwick "What makes a coherence curve change?", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.598939

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