5 May 2005 Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM
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Abstract
The Geometry Verification System NGR2100 enables verification of the entire die, on a resist or an after-etch wafer, by comparing images of a die with corresponding target CAD data. The system detects systematic defects by variable criteria setting for allowable deformation quantities and obtains a CD distribution diagram. The result of systematic defects can then be used to make root cause analysis. The CD distribution diagram can achieve stepper aberration analysis, process windows extraction, macro-loading effect analysis, FEM measurement, and trend analysis more efficiently. Consequently, the Geometry Verification System NGR2100 will contribute to quicker TAT for DFM in Design, Lithography and Mask production.
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Tadashi Kitamura, Tadashi Kitamura, Kazufumi Kubota, Kazufumi Kubota, Toshiaki Hasebe, Toshiaki Hasebe, Futoshi Sakai, Futoshi Sakai, Shinichi Nakazawa, Shinichi Nakazawa, Neeti Vohra, Neeti Vohra, Masahiro Yamamoto, Masahiro Yamamoto, Masahiro Inoue, Masahiro Inoue, } "Introduction of a die-to-database verification tool for the entire printed geometry of a die: geometry verification system NGR2100 for DFM", Proc. SPIE 5756, Design and Process Integration for Microelectronic Manufacturing III, (5 May 2005); doi: 10.1117/12.599467; https://doi.org/10.1117/12.599467
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