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16 May 2005 Modeling and parameter identification of an active anti-vibration system
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Abstract
In the fields of high-resolution metrology and manufacturing, effective anti-vibration measures are required to obtain precise and repeatable results. This is particularly true when the amplitudes of ambient vibration and the dimensions of the investigated or manufactured structure are comparable, e.g. in sub-micron semiconductor chip production, holographic interferometry, confocal optical imaging, and scanning probe microscopy. In the active anti-vibration system examined, signals are acquired by extremely sensitive vibration detectors, and the vibration is reduced using a feedback controller to drive electrodynamic actuators. This paper deals with the modeling of this anti-vibration system. First, a six-degree-of-freedom rigid body model of the system is developed. The unknown parameters of the unloaded system, including actuator transduction constants, spring stiffness, damping, moments of inertia, and the location of the center of mass, are determined by comparing measured transfer functions to those calculated using the updated model. The model is then re-updated for the case of an arbitrarily loaded system. The responses predicted by the final updated model agree well with the experimental measurements, thereby giving confidence in the model and the updating procedure.
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Brad M. Beadle, Stefan Hurlebaus, Uwe Stoebener, and Lothar Gaul "Modeling and parameter identification of an active anti-vibration system", Proc. SPIE 5760, Smart Structures and Materials 2005: Damping and Isolation, (16 May 2005); https://doi.org/10.1117/12.598123
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