5 May 2005 Miniature thin-film NiTi hydraulic actuator with MEMS microvalves
Author Affiliations +
Abstract
The implementation of smaller, lighter, and more agile military systems requires new actuation technologies that offer high power density in compact form factors. The Compact Hybrid Actuator Program (CHAP) is pursuing active material based, rectifying actuators to create new actuation solutions for these demanding applications. Our actuator approach is based on thin film NiTi membranes operating in parallel (high intrinsic power density, >125 kW/kg) combined with liquid rectification, MEMS passive check valves, and commercially available power electronics. Previous results demonstrated 8 micron thick membrane actuation with 150 Hz forced convection response and force output of 100N. This paper focuses on two developments critical in scaling up previous single membrane results to power levels sufficient for military applications. This first is the development of SOI MEMS fabricated microvalve arrays which exhibit high flow rate at high frequencies. The second focus area is the design, fabrication, and assembly of a form factor compact actuator. The initial prototype demonstration of this concept shows great promise for thin film NiTi based actuation both in military technologies and in other areas which demand extremely compact actuation such as embedded fluid delivery for biomedical applications.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Geoff McKnight, Geoff McKnight, Leslie Momoda, Leslie Momoda, Don Croft, Don Croft, Dong Gun Lee, Dong Gun Lee, Daniel Shin, Daniel Shin, Greg Carman, Greg Carman, } "Miniature thin-film NiTi hydraulic actuator with MEMS microvalves", Proc. SPIE 5762, Smart Structures and Materials 2005: Industrial and Commercial Applications of Smart Structures Technologies, (5 May 2005); doi: 10.1117/12.607307; https://doi.org/10.1117/12.607307
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT

TiNi shape memory alloy based micropumps
Proceedings of SPIE (June 30 2005)
Stress engineering for free standing SU 8 2002 thin film...
Proceedings of SPIE (February 06 2012)
MEMS-based active skin for turbulent drag reduction
Proceedings of SPIE (August 04 2003)
Hybrid nanocontact printing (HnCP) process technology
Proceedings of SPIE (January 26 2005)
NiTi shape memory alloy thin film based microgripper
Proceedings of SPIE (April 05 2001)

Back to Top