Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation

A. Selvarajan; Jagannath Nayak; T. Srinivas; D. V. K. Sastry

doi:10.1117/12.602707

16 May 2005 Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation

A. Selvarajan, Jagannath Nayak, T. Srinivas, D. V. K. Sastry

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.602707
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

In this paper, we propose a closed loop Micro-Opto-Electro-Mechanical (MOEM) accelerometer employing a nonuniform cantilever beam and an Anti Resonant Reflecting Optical Waveguide (ARROW) on silicon. The MOEM acelerometer consists of a Mach Zehnder Intereferometer (MZI) and an electro-elasto-optic phase modulator to nullify the acceleration induced phase change so as to make the device work in closed loop form. It is shown that MOEM accelerometers with noise equivalent acceleration of 0.255 μg/√Hz, a dynamic range of 160g, scale factor stability of 1.57 ppm/°C and shock survivability of more than 1000 g is feasible.

Citation Download Citation

A. Selvarajan, Jagannath Nayak, T. Srinivas, and D. V. K. Sastry "Analysis of a nonuniform cantilever beam MOEM accelerometer under closed loop operation", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.602707

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