16 May 2005 Design and development of 3-bit polymer MEMS phase shifters
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Abstract
This paper presents the design and development of 3-bit polymer MEMS phase shifters for wireless communication applications. Polymer membrane and ferroelectric (barium strontium titanate) thin film on silicon substrates are employed for device fabrication. BI-CPW design and fabrication processes of ferroelectric and polymer materials compatible with current silicon technology are investigated. Mechanical operation with low DC bias voltage and scattering parameters of a polymer MEMS switch and phase delay lines are measured. The small size and low pull down voltage demonstrated in this research are promising characteristics for commercial applications of 3-bit polymer MEMS phase shifters with low cost.
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Hargsoon Yoon, Hargsoon Yoon, Taeksoo Ji, Taeksoo Ji, Vijay K. Varadan, Vijay K. Varadan, } "Design and development of 3-bit polymer MEMS phase shifters", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.608127; https://doi.org/10.1117/12.608127
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