16 May 2005 Hierarchical MEMS synthesis and optimization
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A hierarchical MEMS synthesis and optimization architecture has been developed for MEMS design automation. The architecture integrates an object-oriented component library with a MEMS simulation tool and two levels of optimization: global genetic algorithms and local gradient-based refinement. An object-oriented data structure is used to represent hierarchical levels of elements in the design library and their connectivity. Additionally, all elements encapsulate instructions and restrictions for the genetic operations of mutation and crossover. The parameterized component library includes distinct low-level primitive elements and high-level clusters of primitive elements. Surface micro-machined suspended resonators are used as an example to introduce the hierarchical MEMS synthesis and optimization process.
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Ying Zhang, Ying Zhang, Raffi Kamalian, Raffi Kamalian, Alice M. Agogino, Alice M. Agogino, Carlo H. Sequin, Carlo H. Sequin, } "Hierarchical MEMS synthesis and optimization", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.600376; https://doi.org/10.1117/12.600376

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