High-performance sensor platform based on electroactive polymers

Zhimin Li; Suiqiong Li; Z.-Y. Cheng

doi:10.1117/12.598854

16 May 2005 High-performance sensor platform based on electroactive polymers

Zhimin Li, Suiqiong Li, Z.-Y. Cheng

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.598854
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

The performance of new biosensor design -- Micro-ElectroMechanical Diaphragm (MEMD) -- made from PVDF piezoelectric polymer is reported. The resonant frequencies changing with featured size of MEMD are characterized. The resonant behavior in liquid media shows that the damping effect of MEMD is lower than that of MC. Yeast cell detection demonstrated the feasibility of using this platform as biosensor in real time detection. Finally, the preliminary study on microelectronic fabrication of MEMD is presented.

Citation Download Citation

Zhimin Li, Suiqiong Li, and Z.-Y. Cheng "High-performance sensor platform based on electroactive polymers", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.598854

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available