16 May 2005 Millimeter-wave GaAs stepped-impedance hairpin resonator filters using surface micromachining
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In this paper, microstrip stepped-impedance hairpin resonator (SIR) low-pass filter (LPF) and slow-wave band-pass filter (BPF) using dielectric supported air-gapped microstrip line (DAML) of surface micromachining on GaAs substrate are proposed. The DAML structure, which is a new low-loss micromachining transmission line, is useful for the integration of MEMS and/or MMIC components. Design parameters for the proposed SIR low-pass and slow-wave band-pass filters are derived based on stepped-impedance theory. The proposed slow-wave BPF is designed to produce a passband of 10% at the fundamental frequency of 60 GHz. and a new SIR LPF with aperture and IDC (inter-digital capacitor) is designed for 3-dB cutoff frequency of 33 GHz. The measurement results of the BPF filter and LPF filter agree well with simulation results. These filters are useful for many millimeter-wave system applications.
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Ju-Hyun Cho, Ju-Hyun Cho, Tae-Soon Yun, Tae-Soon Yun, Tae-Jong Baek, Tae-Jong Baek, Back-Seok Ko, Back-Seok Ko, Dong-Hoon Shin, Dong-Hoon Shin, Jong-Chul Lee, Jong-Chul Lee, } "Millimeter-wave GaAs stepped-impedance hairpin resonator filters using surface micromachining", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.598757; https://doi.org/10.1117/12.598757

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