16 May 2005 Reinforcement of PDMS masters using silicon plates
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Abstract
In this work, a new method was developed to increase the stiffness of PDMS (Polydimethylsiloxane) masters using Si plates, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both global and local residual deformations in the reinforced PDMS master have been reduced.
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Cheng Luo, Fang Meng, Yiyun Guo, Xinchuan Liu, Amitha Govindaraju, "Reinforcement of PDMS masters using silicon plates", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.600324; https://doi.org/10.1117/12.600324
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KEYWORDS
Silicon

Particles

Lithography

Microfabrication

Nanolithography

Semiconducting wafers

Temperature metrology

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