16 May 2005 The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures
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Abstract
Nanostructured Origami 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.
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Hyun Jin In, Hyun Jin In, William J. Arora, William J. Arora, Paul Stellman, Paul Stellman, Sundeep Kumar, Sundeep Kumar, Shao-Horn Yang, Shao-Horn Yang, Henry I. Smith, Henry I. Smith, George Barbastathis, George Barbastathis, } "The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.600304; https://doi.org/10.1117/12.600304
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