Integrated charge and position sensing for feedback control of electrostatic MEMS

Robert C. Anderson; Balasaheb Kawade; Kandiah Ragulan; D. H. S. Maithripala; Jordan M. Berg; Richard O. Gale; W. P. Dayawansa

doi:10.1117/12.600634

17 May 2005 Integrated charge and position sensing for feedback control of electrostatic MEMS

Robert C. Anderson, Balasaheb Kawade, Kandiah Ragulan, D. H. S. Maithripala, Jordan M. Berg, Richard O. Gale, W. P. Dayawansa

Author Affiliations +

Proceedings Volume 5765, Smart Structures and Materials 2005: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems; (2005) https://doi.org/10.1117/12.600634
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Closed-loop control of electrostatic MEMS requires sensing to provide a feedback signal. We present an integrated sensor for charge and position that negligibly affects the open-loop dynamics, does not increase the device footprint, and may be easily fabricated. Numerical finite-element simulation, incorporating a realistic electrostatic field model, and experimental results validate the functionality of the sensor. Simulations show how the sensor may be used in conjunction with nonlinear control to provide full gap operation and improved transient performance. Nonlinear control is often considered too complex for convenient implementation, however the controller presented may be implemented using on-chip, local, integrated circuit components.

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Robert C. Anderson, Balasaheb Kawade, Kandiah Ragulan, D. H. S. Maithripala, Jordan M. Berg, Richard O. Gale, and W. P. Dayawansa "Integrated charge and position sensing for feedback control of electrostatic MEMS", Proc. SPIE 5765, Smart Structures and Materials 2005: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, (17 May 2005); https://doi.org/10.1117/12.600634

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