Polymeric waveguide design of a 2D scanner

Reynold Panergo; Chao-Shih Liu; Benjamin Estroff; Wei-Chih Wang

doi:10.1117/12.607003

9 May 2005 Polymeric waveguide design of a 2D scanner

Reynold Panergo, Chao-Shih Liu, Benjamin Estroff, Wei-Chih Wang

Proceedings Volume 5768, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV; (2005) https://doi.org/10.1117/12.607003
Event: Nondestructive Evaluation for Health Monitoring and Diagnostics, 2005, San Diego, CA, United States

Abstract

Presented here is the optical characterization and 2D scanning capabilities of an SU-8 based waveguide scanner. Transducing a resonant microcantilever in both the vertical and horizontal direction provides a raster motion useful for imaging when in combination with light source and detector. An application of this design can be in the area of endoscopy where noninvasive instrumentation is desired. MEMS fabricated polymeric devices will allow reduction of the overall size of the system while maintaining the resolution and field-of-view (FOV) of current endoscopes. Our design provides the initial phases for the realization of this system. A waveguide scanner has been fabricated with a 50x100mm cross section and beam length of 2mm. Mode coupling from input to output of the structural design has been determined to be 71.4%. Total power output measured experimentally to be 20%. Preliminary tests have shown 2D imaging with digital processed reconstruction.

Citation Download Citation

Reynold Panergo, Chao-Shih Liu, Benjamin Estroff, and Wei-Chih Wang "Polymeric waveguide design of a 2D scanner", Proc. SPIE 5768, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV, (9 May 2005); https://doi.org/10.1117/12.607003

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