8 December 2004 Design and simulation of uncooled bi-material infrared detector
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Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607409
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
A new uncooled bi-material microcantilever detector is based on between bi-material large difference in thermal expansion and Young’s modulus, having light, low cost, high sensitivity to radiation, and very matching with silicon IC technologies. A 3D microcantilever detector model had been built and simulated by ANSYS thermal-stress coupled, and gained responses to IR radiation with temperature changes, contributing to maximum deflection of geometry size.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xin Xu, Xin Xu, Fangmin Guo, Fangmin Guo, Wei Lu, Wei Lu, Shaoxin Yu, Shaoxin Yu, Yuping Ge, Yuping Ge, Ning Li, Ning Li, } "Design and simulation of uncooled bi-material infrared detector", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607409; https://doi.org/10.1117/12.607409
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