Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer

Yuping Ge; Fangmin Guo; Weiming Wang; Shaoxin Yu; Li Shao; Ziqiang Zhu; Wei Lu

doi:10.1117/12.607416

8 December 2004 Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer

Yuping Ge, Fangmin Guo, Weiming Wang, Shaoxin Yu, Li Shao, Ziqiang Zhu, Wei Lu

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607416
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

A low-loss microwave Coplanar Waveguides (CPW) was fabricated on Porous Silicon (PS) substrate oxidated and coated with polyimide. The high frequency performance of PS/Oxidated PS (OPS) was observed through fabrication and measurement of CPW on N/P-type PS. The CPW loss was lowered to 0-7.5dB/1.2cm in 0-40GHZ in comparison with quartz and poly-Si/SiO₂/high -resistivity Si, and some conclusions were drawn out.

Citation Download Citation

Yuping Ge, Fangmin Guo, Weiming Wang, Shaoxin Yu, Li Shao, Ziqiang Zhu, and Wei Lu "Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607416

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