8 December 2004 Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application
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Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607900
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
This paper presents numerical analysis of pull-in voltage for contact microelectromechanical (MEMS) switch in switched-line phase shifter application. The contact MEMS switch consists of a fixed-fixed thin metal membrane called the “bridge” suspended over a broken center conductor of coplanar waveguide (CPW). The center conductor sandwiched by a pair of symmetrical off-center drive capacitors that form two electrostatic actuators. A lumped-model for two coupled parallel-plates actuators is applied to describe the electromechanical behavior and the pull-in phenomenon in the contact MEMS switch. And a static mechanical model including the residual stress effects is developed to provide the effective stiffness coefficient for the prediction of pull-in voltage in a contact MEMS switch with uniform bridge width. As a theoretical basis, lower pull-in voltage can be achieved by optimizations on structure and material of bridge.
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Ling Jiang, Ling Jiang, Yanling Shi, Yanling Shi, Wei Li, Wei Li, Yanfang Ding, Yanfang Ding, Zongshen Lai, Zongshen Lai, Ziqiang Zhu, Ziqiang Zhu, } "Numerical analysis of pull-in voltage for contact MEMS switches in switched-line phase shifter application", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607900; https://doi.org/10.1117/12.607900
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