Paper
8 December 2004 Photonic crystal slab made from porous silicon
W. H. Zheng, P. Reece, M. Gal
Author Affiliations +
Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.608682
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
The concept of photonic crystal (PC) was raised by E.Yablonovitch and S.John respectively in 1989. Since then on, photonic crystal made tremendous progress in the research and application. Photonic crystal is not some kind of new materials but periodic dielectric materials. We have designed, fabricated photonic crystal slab (PCS) based on porous silicon. These alternating dielectric porous silicon layers show a band gap in one direction. Incident light is reflected for colors of light in the band gap, so porous silicon photonic crystal slabs have high reflection in the range of band gap. By mean of electrochemical lift-off, the PCS could be removed from silicon substrate, and PC band gap could be observed clearly in the reflectivity spectra.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. H. Zheng, P. Reece, and M. Gal "Photonic crystal slab made from porous silicon", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.608682
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KEYWORDS
Silicon

Photonic crystals

Etching

Reflectivity

Dielectrics

Optical microcavities

Crystals

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