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8 December 2004 Study on DC-contact MEMS switches
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Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607901
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
This paper presents the design, fabrication and performance of a metal-to-metal contact shunt micro-electro-mechanical (MEMS) switch. The switch was composed of a fixed-fixed Al0.96Si0.04 alloy beam with two pull-down electrodes and a central dc-contact area. The switch was placed in an in-line configuration in a coplanar waveguide transmission line. The best RF performance shows insertion loss of less than 0.3dB and isolation of greater than 35dB for all frequencies up to 10 GHz.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. J. Chen, H. Z. Wei, M. L. Hu, and Zong Shen Lai "Study on DC-contact MEMS switches", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607901
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