The characteristic criterion of the growth of metallic films from discontinuous to continuous

Ping Fan; Hong-Ji Qi; Kui Yi; Jian-Da Shao; Zheng-Xiu Fan

doi:10.1117/12.607271

8 December 2004 The characteristic criterion of the growth of metallic films from discontinuous to continuous

Ping Fan, Hong-Ji Qi, Kui Yi, Jian-Da Shao, Zheng-Xiu Fan

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607271
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

A characteristic criterion of the growth of metallic films from discontinuous to continuous has been proposed. That is, when the electric conductivity σ of thin metallic film equals to 63.2% of the electric conductivity σ of the infinitely thick metallic film, the growth of metallic films come into continuous film. The corresponding equivalent thickness d₀ of the characteristic criterion can be thought of as the characteristic thickness of the growth of metal films from discontinuous to continuous. According this characteristic criterion, the characteristic thicknesses of Co films and Cu films have been given. The topography images of Co and Cu films have been observed using atomic force microscopy.

Citation Download Citation

Ping Fan, Hong-Ji Qi, Kui Yi, Jian-Da Shao, and Zheng-Xiu Fan "The characteristic criterion of the growth of metallic films from discontinuous to continuous", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607271

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