8 December 2004 The characteristic criterion of the growth of metallic films from discontinuous to continuous
Author Affiliations +
Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607271
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
A characteristic criterion of the growth of metallic films from discontinuous to continuous has been proposed. That is, when the electric conductivity σ of thin metallic film equals to 63.2% of the electric conductivity σ of the infinitely thick metallic film, the growth of metallic films come into continuous film. The corresponding equivalent thickness d0 of the characteristic criterion can be thought of as the characteristic thickness of the growth of metal films from discontinuous to continuous. According this characteristic criterion, the characteristic thicknesses of Co films and Cu films have been given. The topography images of Co and Cu films have been observed using atomic force microscopy.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ping Fan, Ping Fan, Hong-Ji Qi, Hong-Ji Qi, Kui Yi, Kui Yi, Jian-Da Shao, Jian-Da Shao, Zheng-Xiu Fan, Zheng-Xiu Fan, } "The characteristic criterion of the growth of metallic films from discontinuous to continuous", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607271; https://doi.org/10.1117/12.607271
PROCEEDINGS
4 PAGES


SHARE
Back to Top