The nanostructures and optical properties of ZnO films by RF magnetron sputtering

Bo Huang; Suntao Wu; Jing Li; Shigang Sun; Zhong-Qun Tian

doi:10.1117/12.607551

8 December 2004 The nanostructures and optical properties of ZnO films by RF magnetron sputtering

Bo Huang, Suntao Wu, Jing Li, Shigang Sun, Zhong-Qun Tian

Author Affiliations +

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607551
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

ZnO nano films were deposited on SiO₂/P-Si (100) by RF magnetron sputtering. The interrelationships among growth conditions, crystal structures, and optical properties of the ZnO films were discussed. The reflection spectra of the films reveal that the band-gap of the films is between 3.2-3.3eV. The photoluminescence spectra provide further evidence for the relation between the green emission of ZnO films and the oxygen vacancy or Zn interstitial related defects. The results also demonstrate that the UV emission of ZnO is dependent on the size of the nano-crystallites forming the films. By comparing with the photoluminescence spectra at low temperature, the possible mechanism for this dependent relation was discussed.

Citation Download Citation

Bo Huang, Suntao Wu, Jing Li, Shigang Sun, and Zhong-Qun Tian "The nanostructures and optical properties of ZnO films by RF magnetron sputtering", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607551; https://doi.org/10.1117/12.607551

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years