The preparation of diamond films on new composite ceramic substrates of diamond and alumina

Yue Shen; Yiben Xia; Feng Gu; Qingfeng Su; Jiancheng Zhang

doi:10.1117/12.607629

8 December 2004 The preparation of diamond films on new composite ceramic substrates of diamond and alumina

Yue Shen, Yiben Xia, Feng Gu, Qingfeng Su, Jiancheng Zhang

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607629
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

This paper reports the preparation and properties of diamond films deposited on new composite ceramic substrates of diamond and alumina. The influences of the substrates to the properties of diamond films were discussed. The Raman spectra and SEM show that the substrates which prepared by hot pressing sintering were more suitable to deposit high quality diamond films. The main reason why diamond films deposited on composite ceramic substrates without any pre-treatment have good qualities and why the composite ceramic substrate is appropriated to deposit large area diamond films are studied.

Citation Download Citation

Yue Shen, Yiben Xia, Feng Gu, Qingfeng Su, and Jiancheng Zhang "The preparation of diamond films on new composite ceramic substrates of diamond and alumina", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607629

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