8 December 2004 Tunable properties of PbxSr1-xTiO3 thin films
Author Affiliations +
Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607283
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
Lead strontium titanate (PbxSr1-xTiO3) thin films with Pb/Sr ration of 10/90, 20/80, 30/70 and 40/60 were deposited on Pt/Ti/SiO2/Si substrates by sol-gel techniques. Both structural and dielectric properties of PST films as a function of Pb/Sr ratios were investigated. PST thin films showed typical polycrystalline structure without preferential orientation. The measured capacitance and tunability systematically increased with the increase in Pb content. Among all the PST thin films, PST (30/70) thin film has the best crystallization and dielectric properties. The dielectric constant, dielectric loss tenability and FOM of the PST (30/&70) film are 376,0.022, 61.0% and 28, respectively.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boyu Ni, Boyu Ni, Dongwen Peng, Dongwen Peng, Wenbiao Wu, Wenbiao Wu, Zhongyan Meng, Zhongyan Meng, } "Tunable properties of PbxSr1-xTiO3 thin films", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607283; https://doi.org/10.1117/12.607283
PROCEEDINGS
4 PAGES


SHARE
Back to Top