Paper
14 February 2005 Estimation of cyclic error due to scattering in the internal OPD metrology of the Space Interferometry Mission
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Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611645
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico
Abstract
A common-path laser heterodyne interferometer capable of measuring the internal OPD with accuracy of the order of 10 pm was demonstrated at JPL. To achieve this accuracy, the relative power received by the detector that is contributed by the scattering of light at the optical surfaces should be less than -97 dB. A method has been developed to estimate the cyclic error caused by the scattering of the optical surfaces. The result of the analysis is presented.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hong Tang and Feng Zhao "Estimation of cyclic error due to scattering in the internal OPD metrology of the Space Interferometry Mission", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); https://doi.org/10.1117/12.611645
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Cited by 2 scholarly publications.
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KEYWORDS
Light scattering

Scattering

Sensors

Laser scattering

Metrology

Beam splitters

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