14 February 2005 Optical tomography of phase objects with phase-shifting interferometry and stepping wise shifted Ronchi ruling
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Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005) https://doi.org/10.1117/12.611838
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico
Abstract
An experimental setup for tomographic inspection of phase objects is presented. The system is based on an interferometer which uses two windows in the input plane and a translating grating as its pupil. In the output, interference of the fields associated with replicated windows can be achieved by a proper choice of the spacing between windows with respect to the grating period. Placing a rotating object in one window and with a reference crossing through the second one, the phase of projections results encoded in a composite interference pattern over the plane of the traditional sinogram. Phase stepping of such composite interferograms can be achieved by lateral translation of the grating to obtain the unwrapped phase distribution as the corresponding sinogram of the object slide under inspection. The sinogram allows tomographic reconstruction of slices by standard procedures. Composite interferograms and preliminary reconstructions for some transparent samples are shown.
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Cruz Meneses-Fabian, Cruz Meneses-Fabian, Gustavo Rodriguez Zurita, Gustavo Rodriguez Zurita, Victor Arrizón, Victor Arrizón, } "Optical tomography of phase objects with phase-shifting interferometry and stepping wise shifted Ronchi ruling", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); doi: 10.1117/12.611838; https://doi.org/10.1117/12.611838
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