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14 February 2005 The optical frequency method of distance measurement with sub-nanometer resolution
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Proceedings Volume 5776, Eighth International Symposium on Laser Metrology; (2005)
Event: Eighth International Conference on Laser Metrology, 2005, Merida, Mexico
We present design and experimental setup for direct transformation of the relative change of distances in measuring arm of the Michelson interferometer to relative changes of the resonant optical-frequency of Fabry-Perot (F.-P.) resonator. The method consists of a mechanical coupled moving system of the corner cube mirror of the interferometer measuring arm with one of the mirrors of F.-P. resonator. A piezoelectric transducer (PZT) with elongation 10 microns approximately drives that moving system. An external tunable laser source at 633 nm wavelength provides identification of one of the resonant optical frequency of F.-P. resonator by the frequency locking mechanism with synchronous detection technique in the servo loop feedback. Because the definition of the meter unit is based on iodine stabilized He-Ne laser, then the optical frequency of the locked tunable laser is frequency compared with He-Ne-I2 laser by the heterodyne optical mixing. A fast high-resolution counter counts the resultant radio-frequency signal as a product of the optical mixing. Measured frequency values and values of interference phase acquired by the interferometer are simultaneously sampled step by step for each elongation position of PZT element. We used that experimental setup for the testing process where a verification of scale-linearity of Michelson interferometer with total resolution 0,3 nm is investigated. The experimental data achieved by F.-P. resonator during such a way shows the absolute uncertainty better than 0,08 nm for the relative distance change 1.5 microns. We verified the scale-linearity of Michelson interferometer to ±1,0 nm limit.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ondrej Cip, Frantisek Petru, and Josef Lazar "The optical frequency method of distance measurement with sub-nanometer resolution", Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005);


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