Recent progress on LWIR and VLWIR HgCdTe focal plane arrays

Muren Chu; S. Terterian; D. Walsh; H. K. Gurgenian; S. Mesropian; R. J. Rapp; W. D. Holley

doi:10.1117/12.600893

31 May 2005 Recent progress on LWIR and VLWIR HgCdTe focal plane arrays

Muren Chu, S. Terterian, D. Walsh, H. K. Gurgenian, S. Mesropian, R. J. Rapp, W. D. Holley

Proceedings Volume 5783, Infrared Technology and Applications XXXI; (2005) https://doi.org/10.1117/12.600893
Event: Defense and Security, 2005, Orlando, Florida, United States

Abstract

High performance LWIR and VLWIR focal plane arrays have been produced on advanced HgCdTe/ZnCdTe materials. The ZnCdTe substrates typically are n-type with an infrared transmission over 65%. Mesa and planar ion-implantation-isolated heterojunction processes have been used to produce the arrays. The operability of 128x128, 10.6mm arrays reached 99.27% based on the criteria that the signal output is within +/-30% of the mean. Several 320x256 arrays with wavelength from 12mm to 13.75mm at 77-85K have also been produced. Excellent imaging pictures have been obtained at these temperatures.

Citation Download Citation

Muren Chu, S. Terterian, D. Walsh, H. K. Gurgenian, S. Mesropian, R. J. Rapp, and W. D. Holley "Recent progress on LWIR and VLWIR HgCdTe focal plane arrays", Proc. SPIE 5783, Infrared Technology and Applications XXXI, (31 May 2005); https://doi.org/10.1117/12.600893

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