31 May 2005 Superconducting microbolometer with controllable coordinate sensitivity: an alternative approach to FPA design
Author Affiliations +
A method of controlling the coordinate sensitivity in a high temperature superconducting microbolometer is described. A laser beam, precisely focused on the patterned superconducting structure, was used to nucleate a resistive area that is sensitive to external thermal effects. The electron beam lithography and wet chemical etching were applied as pattern transfer processes in epitaxial Y-Ba-Cu-O films. Two different sensor designs were tested: (i) 3 millimeters long and 40 micrometers wide stripe and (ii) 1.25 millimeters long, and 50 micron wide meander -like structure. It is shown experimentally that scanning the laser beam along the stripe leads to physical displacement of the sensitive area and, therefore may be used as a basis for imaging over a broad spectral range. Our approach, by which the coordinate sensitivity of a microfabricated superconducting stripe is controlled, is an alternative solution to Focal Plane Array (FPA) design. For example, patterning the superconducting film into a meander structure is equivalent to a two-dimensional detector array. In additional to the simplicity of the detector fabrication sequence (one step mask transfer), a clear advantage of this approach is the simplicity of the read-out process: an image is formed by registering the signal with only two electrical terminals. The proposed approach can be extended for imaging over a wide spectral range; the limiting factor is the wavelength-dependent efficiency of thermal conversion in the film/substrate system.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. Yefremenko, V. Yefremenko, E. Gordiyenko, E. Gordiyenko, G. Shustakova, G. Shustakova, S. D. Bader, S. D. Bader, V. Novosad, V. Novosad, } "Superconducting microbolometer with controllable coordinate sensitivity: an alternative approach to FPA design", Proc. SPIE 5783, Infrared Technology and Applications XXXI, (31 May 2005); doi: 10.1117/12.603647; https://doi.org/10.1117/12.603647

Back to Top