19 May 2005 Multiple methods of modeling MEMS
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Micro-Electro-Mechanical Systems or MEMS are becoming increasingly important in several optical applications. In particular, devices composed of an array of active micro-optics can be used for wavefront correction, optical switching, and generic digital light control. Whatever the application, it is important for anyone seeking to employ this technology to use computer modeling to predict the performance of the subsystem that incorporates optical MEMS. In this paper we will show how commercially available software can be used to model these systems using several approaches.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brien J. Housand, Leo Gardner, and G. Groot Gregory "Multiple methods of modeling MEMS", Proc. SPIE 5798, Spaceborne Sensors II, (19 May 2005); doi: 10.1117/12.603814; https://doi.org/10.1117/12.603814


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