25 May 2005 Operation modes for a linear array of optical flexible reflective analog modulators
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A unique MEMS based spatial light modulator has been developed by INO and its partners for projection display applications. This unique device incorporates a linear array of micromirrors. Each micromirror is a 25 μm x 25 μm microbridge. Electrostatic actuation allows the control of the curvature of each micromirror independently. Combined with appropriate optics, this allows display of images with well over a thousands columns at a frame rate of 60 Hz. Operation and performance of this modulator have already been reported in the literature (SPIE Proceeding, Vol. 4985, p. 44-55; SPIE Proceeding, Vol. 5289, p. 284-293). In the latter paper, a brief description of various possible operation modes of this modulator has been presented. The objective of the present article is to provide an in-depth study of these operation modes. The study is done using numerical simulations. Several methods are employed to propagate the laser beam illuminating the micromirrors through the optical system. The gaussian beam superposition method is used to propagate the laser beam from the system input to the micromirrors. The reflexion on the micromirrors is computed by ray tracing. Finally, the angular spectrum of plane waves method is used to propagate the reflected coherent beam through Schlieren optics which converts the curvature of the micromirror into gray levels. The simulated optical response of the system as a function of the micromirror curvature is provided for various operation modes.
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Michel Doucet, Michel Doucet, Francis Picard, Francis Picard, Keith K. Niall, Keith K. Niall, Hubert Jerominek, Hubert Jerominek, } "Operation modes for a linear array of optical flexible reflective analog modulators", Proc. SPIE 5801, Cockpit and Future Displays for Defense and Security, (25 May 2005); doi: 10.1117/12.604059; https://doi.org/10.1117/12.604059

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