28 March 2005 Optically addressed MEMS driven with high-frequency modulated light
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Abstract
In this paper we propose a new operational mechanism for an optically addressed deformable mirror device. The device consists of a pixilated metallized membrane mirror supported above an optically addressed photoconductive substrate. A conductive transparent conductive electrode is deposited on the backside of the substrate. A DC bias is applied between the membrane and the back electrode of the device accompanied with very high frequency modulated light. The membrane is deformed when light is shone from the backside of the device. This occurs due to impedance and bias redistribution between the two cascaded impedances.
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Jed Khoury, Charles L. Woods, Bahareh Haji-Saeed, John Kierstead, "Optically addressed MEMS driven with high-frequency modulated light", Proc. SPIE 5816, Optical Pattern Recognition XVI, (28 March 2005); doi: 10.1117/12.604207; https://doi.org/10.1117/12.604207
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